JPH02137037U - - Google Patents
Info
- Publication number
- JPH02137037U JPH02137037U JP4376289U JP4376289U JPH02137037U JP H02137037 U JPH02137037 U JP H02137037U JP 4376289 U JP4376289 U JP 4376289U JP 4376289 U JP4376289 U JP 4376289U JP H02137037 U JPH02137037 U JP H02137037U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- vacuum suction
- transport mechanism
- jet nozzle
- transports
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 4
- 230000007723 transport mechanism Effects 0.000 claims 2
- 239000007921 spray Substances 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4376289U JPH02137037U (en]) | 1989-04-14 | 1989-04-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4376289U JPH02137037U (en]) | 1989-04-14 | 1989-04-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02137037U true JPH02137037U (en]) | 1990-11-15 |
Family
ID=31556452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4376289U Pending JPH02137037U (en]) | 1989-04-14 | 1989-04-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02137037U (en]) |
-
1989
- 1989-04-14 JP JP4376289U patent/JPH02137037U/ja active Pending